Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four...

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书目详细资料
主要作者:	Gomez, Maribel
其他作者:	Ramírez, Treviño, Figueras, Edward, Sauceda, Angel
格式:	Artículo
语言:	en_US
出版:	2018
主题:	MEMS thermal sensor thermal resistance thermoelectrical characterization microcalorimeter info:eu-repo/classification/cti/1
在线阅读:	http://smctsm.org.mx/ojs/index.php/SyV/article/view/65/176
标签:	添加标签没有标签, 成为第一个标记此记录!

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