Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Area selective deposition (ASD) is an emerging method for the patterning of electronic devices as it can significantly reduce processing steps in the industry. A potential ASD methodology uses infiltration of metal precursors into patterned polymer materials. The work presented within demonstrates t...

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Bibliografske podrobnosti
Drugi avtorji: Snelgrove, Matthew, Mani Gonzalez, Pierre Giovanni, McFeely, Caitlin, Lahtonen, K, Lundy, Ross, Hughes, Greg, Valden, M, McGlynn, Enda, Yadav, Pravind, Saari, J, Morris, Mike A, O Connor, Robert
Format: Artículo
Jezik:English
Izdano: 2020
Teme:
Polymer, ASD
info:eu-repo/classification/cti/7
Online dostop:https://doi.org/10.1016/j.apsusc.2020.145987
https://www.sciencedirect.com/science/article/pii/S0169433220307431
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