Titanium infiltration into ultrathin PMMA brushes

Titanium infiltration into ultrathin PMMA brushes

Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...

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主要作者:	Mani Gonzalez, Pierre Giovanni
其他作者:	McFeely, Caitlin, Snelgrove, Matthew, Shiel, Kyle, Hernandez-Marquez, Jesus Alfredo, O Connor, Robert
格式:	Artículo
语言:	en_US
出版:	2021
主题:	info:eu-repo/classification/cti/7
在线阅读:	https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061
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