Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma enhanced atomic layer deposition (PEALD) process. The chemical properties are...

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其他作者:	Snelgrove, Matthew, Mani Gonzalez, Pierre Giovanni, McFeely, Caitlin, Hughes, Gregory, Weiland, C, Woicik, Joshep, Shiel, Kyle, Ornelas, Carlos, Solis-Canto, Óscar, Cherkaoui, K, Hurley, P, Yadav, Pravind, Morris, Michael, McGlynn, Enda, O'Connor, Rob
格式:	Artículo
语言:	English
出版:	2022
主题:	info:eu-repo/classification/cti/7
在线阅读:	https://doi.org/10.1016/j.mee.2022.111888 https://www.sciencedirect.com/science/article/pii/S0167931722001824
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