Influence of post‑deposition annealing on the chemical states of crystalline tantalum pentoxide films

Influence of post‑deposition annealing on the chemical states of crystalline tantalum pentoxide films

We investigate the effect of post-deposition annealing (for temperatures from 848 K to 1273 K) on the chemical properties of crystalline Ta2O5 films grown on Si(100) substrates by radio frequency magnetron sputtering. The atomic arrangement, as determined by X-ray diffraction, is predominately hex...

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Bibliografiske detaljer
Hovedforfatter:	Perez, Israel
Andre forfattere:	Sosa, Víctor, Gamboa, Fidel, Elizalde Galindo, Jose Trinidad, Enriquez-Carrejo, Jose Luis, Mani, Pierre, Farias, Rurik
Format:	Artículo
Sprog:	English
Udgivet:	2018
Fag:	XPS Ta2O5 oxidation states chemical properties info:eu-repo/classification/cti/7
Online adgang:	https://doi.org/10.1007/s00339-018-2198-9 https://link.springer.com/article/10.1007/s00339-018-2198-9
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